Growth-based monolithic 3D integration of single-crystal 2D...

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Growth-based monolithic 3D integration of single-crystal 2D semiconductors

Nature, Published online: 18 December 2024; doi:10.1038/s41586-024-08236-9Single-crystalline materials can be grown on amorphous surfaces at below 400 C, enabling monolithic three-dimensional integration of vertically stacked transistors.

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